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Leandro Lorenzelli

Centre for Materials and Microsystems, Fondazione bruno Kessler, Italy
Introduction to Silicon Micromachining Technology

Microfabrication technology for microsystems (MST) on silicon have been recognized as one of the most promising for theirs potential of innovation in the research and development of miniaturized systems in the field of micromechanics. Moreover, the possibility of integration of planar silicon-based technologies, typical of microelectronics, with the most recent microfabrication techniques has allowed developing a large area of different microsystems with a big fall-out effect on the industrial sector. The aim of this lecture is to illustrate a review of  the available technologies in this field by presenting the state of the art in the area of MEMS and related technological approaches.